Fast online simulation of 3D nanophotonic structures by the reduced basis method Conference Paper uri icon

Overview

MeSH Major

  • Cell Transformation, Viral
  • Oncogenes
  • Receptors, Cell Surface

abstract

  • We present algorithmic details and applications of the reduced basis method as efficient Maxwell solver to nanophotonic applications including examples from mask optimization in photolithography and parameter retrieval in inverse problems, e.g., in optical metrology. The reduced basis method is a currently studied approach to the multiple solution of problems depending on a number of geometrical, material and source parameters. Such problems occur frequently in optimization tasks where parameters have to be adjusted in order to minimize some error functionals or in production environments where deviations from ideal structures have to be controlled.

publication date

  • April 11, 2011

Research

keywords

  • Conference Paper

Identity

Digital Object Identifier (DOI)

  • 10.1117/12.874726

Additional Document Info

volume

  • 7941