Rigorous Simulation of 3D Masks Conference Paper uri icon


MeSH Major

  • Cell Transformation, Viral
  • Oncogenes
  • Receptors, Cell Surface


  • We perform 3D lithography simulations by using a finite-element solver. To proof applicability to real 3D problems we investigate DUV light propagation through a structure of size 9 μm × 4 μm × 65 nm. On this relatively large computational domain we perform rigorous computations (No Hopkins) taking into account a grid of 11 × 21 source points with two polarization directions each. We obtain well converged results with an accuracy of the diffraction orders of about 1%. The results compare well to experimental aerial imaging results. We further investigate the convergence of 3D solutions towards quasi-exact results obtained with different methods.

publication date

  • December 2006



  • Conference Paper


Digital Object Identifier (DOI)

  • 10.1117/12.687816

Additional Document Info


  • 6349 I