Benchmark of FEM, waveguide and FDTD algorithms for rigorous mask simulation Conference Paper uri icon

Overview

MeSH Major

  • Cell Transformation, Viral
  • Oncogenes
  • Receptors, Cell Surface

abstract

  • An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was proven by examining a set of typical problems and by a benchmarking against two established methods (FDTD and a differential method) and an analytical example. The new finite element approach was up to 100x faster than the competing approaches for moderate target accuracies, and it was the only method which allowed to reach high target accuracies.

publication date

  • December 2005

Research

keywords

  • Conference Paper

Identity

Digital Object Identifier (DOI)

  • 10.1117/12.631696

Additional Document Info

volume

  • 5992

number

  • 1